Ultrasonic Motors
TULA — Ultra-Compact Ultrasonic Motor
While electromagnetic and fluid actuators (pneumatic, hydraulic) have long been the mainstream, ultrasonic motors are now adopted not only in industrial equipment but also in mobile devices such as digital cameras and smartphones. The ultra-compact ultrasonic motors we provide were commercialized by Piezoelectric Technology Co., Ltd in Korea. Combined with our own high-resolution micro encoders, they enable highly accurate automation of fine mechanical structures through stages, drivers, and controllers.
TULA Features
- Self-lubricating shaft doubles as the guide axis
- Vacuum (10⁻⁵ Pa) operation possible with material/adhesive changes
- Built from non-magnetic materials — operates in strong magnetic fields
- Simple construction with few parts enables low-cost mass production
- Direct drive mechanism yields high mechanical responsiveness (vibration → motion)
- Complete stop by friction when stationary (no vibration, no heat)
- Quiet operation
- High holding force even without power
- Low-speed, high-thrust, lightweight design without reduction gears
TULA Driving Principle
TULA is a next-generation ultra-compact linear actuator based on vibration control of unimorph or bimorph piezoelectric ceramics. A piezo ceramic fixed at the base of the drive shaft vibrates, and by varying the speed of forward and return motion, it shifts the friction body (slider) by tiny increments. Built on the impact drive principle (inertia law), motion is controlled at ultrasonic frequencies for smooth operation. Despite the compact form factor, it delivers high thrust and holding force — ideal for precision positioning.
Linear / XY Stage
Ultra-compact, high-precision linear and XY stages driven by TULA ultrasonic motors. A lineup of 15 models spanning standard single- and dual-axis types, cross roller guide, linear guide, and hollow types. Resolution down to 0.1μm with power-off holding.
Rotary Stage
Ultra-compact, high-precision rotary stages driven by TULA ultrasonic motors. Lineup of 6 models including solid-axis (θDT/θMDT) and hollow-axis (θHDT). 0.005° resolution and power-off holding.
Finger Unit
Precision gripping fingers driven by ultrasonic motors for handling sub-millimeter parts in optical and semiconductor applications. Available with open-loop, closed-loop (encoder-equipped), and integrated Z-axis variants.
Cage System
XY/Z motion mounts driven by ultrasonic motors for integration into THORLABS optical cage systems. Adjusts optical elements up to φ1/2 inch with sub-micron precision.