Z-Θ
Linear actuator integrating Z-axis (linear) and θ-axis (rotary). The shaft features a vacuum line for pick-and-place component transport. Each axis is equipped with our optical encoder for high-speed, high-precision operation. Ideal for picking up micro electronic components, precisely positioning them at the required rotation angle, and placing them.
Features
- Integrated Z-axis and θ-axis
- Vacuum line equipped
- Optical encoder equipped
- High-speed pick & place
Z-θ Unit Specifications
Z-axis uses a linear motor and θ-axis uses a coreless AC servo motor. Each axis is equipped with our optical encoder for high-speed and high-precision operation. Ideal for picking up micro electronic components and precisely positioning them at the required rotation angle.
ZLR Series (Z-axis + θ-axis)
| Item | ZLR45-15 | ZLR25-15 | ZLR20-8.8 |
|---|---|---|---|
| Body size (H/D/W) | 216.4/83.5/15.0mm | 196.4/83.5/15.0mm | 145.5/70/8.8mm |
| Weight | 570g | 520g | 260g |
| Movable mass | 150g | 150g | 80g |
| Power supply | DC24V | DC24V | DC24V |
| Z-axis stroke | 45mm | 25mm | 20mm |
| Z-axis resolution | 0.1μm | 0.1μm | 0.1μm |
| Z-axis positioning accuracy | ±3pls | ±3pls | ±3pls |
| Z-axis max speed | 1.5m/sec | 1.0m/sec | 300mm/sec |
| Z-axis acceleration | 5G | 5G | 2G |
| Tip runout | ±15μm | ±15μm | ±15μm |
| Rotary resolution | 0.005° | 0.005° | 0.005° |
| Rotary positioning accuracy | ±3pls | ±3pls | ±3pls |
| Max torque | 0.07mN·m | 0.07mN·m | 40mN·m |
| Max rotation speed | 7000rpm | 7000rpm | 2000rpm |
ZLA Series (Z-axis only)
| Item | ZLA25-9 | ZLA12-15 |
|---|---|---|
| Body size (H/D/W) | 144.5/62.5/9mm | 165/55/12mm |
| Weight | 200g | 240g |
| Movable mass | 50g | 120g |
| Power supply | DC24V | DC24V |
| Z-axis stroke | 25mm | 120mm |
| Z-axis resolution | 0.1μm | 0.1μm |
| Z-axis positioning accuracy | ±3pls | ±3pls |
| Z-axis max speed | 200mm/sec | 200mm/sec |
| Z-axis acceleration | 3G | 3G |
| Tip runout | ±15μm | ±15μm |
ZVR Series (Pressure Control)
High-precision pick & place units with pressure control. Optimized integrated mechanism delivers rotational runout of ≤±2 µm. Air-bearing model (ZVR-A30) supports pressing forces from 1 g; ball-bearing model (ZVR-B30) from 10 g.
ZVR Series Specifications
| Item | ZVR-A30 | ZVR-B30 |
|---|---|---|
| Body size (H/D/W) | 116.5/28.0/46.5mm | 116.5/28.0/46.5mm |
| Weight | 260g | 260g |
| Movable mass | 60g | 60g |
| Power supply | DC24V | DC24V |
| Z-axis drive motor | Voice coil motor | Voice coil motor |
| Bearing | Air bearing | Ball bearing |
| Rotational runout | ±2μm | ±15μm |
| Vacuum port | Yes | Yes |
| Z-axis stroke | 5mm | 5mm |
| Z-axis resolution | 0.1μm | 0.1μm |
| Z-axis positioning accuracy | ±3pls | ±3pls |
| Z-axis max speed | 100mm/sec | 100mm/sec |
| Z-axis acceleration | 1G | 1G |
| Thrust constant | 2N/A | 2N/A |
| Rated thrust | 1.2N | 1.2N |
| Max thrust | 3N | 3N |
| Pressure resolution | 0.1g | 1.0g |
| Min pressing force | 1.0g | 10g |
| Max pressing force | 150g | 150g |
| Pressure accuracy | ±10% | ±10% |
| Rotary resolution | 0.005° | 0.005° |
| Rotary positioning accuracy | ±3pls | ±3pls |
| Max torque | 30mN·m | 30mN·m |
| Max rotation speed | 2000rpm | 2000rpm |